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MEMS/Nanotechnology Synchrotron Workshop

Workshop Information | Workshop Schedule | Workshop Flyer (pdf format)
Abstracts of the Presentations | About the Speakers

Workshop Information

Thursday, May 30, 2002
1:00 to 4:00 PM

Edmonton

Calgary

Live:

Room CEB 231
Civil/Electrical Engineering Building
University of Alberta, Edmonton

Via videoconference:

Room 587, Learning Commons Centre,
Biological Sciences
University of Calgary, Calgary

Workshop Schedule

1:00 PM Ken Schmidt
Welcoming Remarks
1:15 PM David Klymyshyn
Opportunities for Building Microwave RF Devices at the CLS
1:45 PM Volker Saile
MEMS and Nanofabrication Using Synchrotron Technology
3:00 PM Coffee
3:15 PM Andrew Gilliland
Status and Planning for the National Institute for Nanotechnology

Abstracts

Dr. David Klymyshyn

Associate Professor, Department of Electrical Engineering, University of Saskatchewan
Scientist, Telecommunication Research Labs (TRLabs)
Nanotech Beamline Team Leader for the Canadian Light Source

Opportunities for Building Microwave RF Devices at the CLS

With the Canadian Light Source (CLS) Synchrotron being built in Saskatoon, opportunities for using the synchrotron to build structures using X-Ray lithography and MEMS for applications such as advanced Microwave RF devices present. This talk will provide some of the preliminary considerations being given in this area, as well as the efforts that have been underway to propose a MEMS/Nanotechnology Beamline facility at the CLS.

Dr. Volker Saile

Professor of Microstructure Technology, Karlsruhe University, Germany
Adjunct Professor of Physics, Louisiana State University
Director, Angstrom Source Karlsruhe Synchrotron (ANKA)
Director, Institute for Microstructure Technology (IMT), Karlsruhe

MEMS and Nanofabrication Using Synchrotron Technology

Synchrotron lithography techniques offer significant advantages for microelectronics, MEMs, and Nanotechnology applications as extremely precise electrical and mechanical structures with high aspect ratios can be built. Dr. Saile will give an overview of activities at the Institut für Mikrostrukturtechnik (IMT) at Forschungszentrum Karlsruhe, the birthplace of the LIGA technology, which uses synchrotron X-rays for fabricating micro-devices. Over the past ten years LIGA (deep X-ray lithography (XRL) with synchrotron radiation, electroplating, and replication by hot-embossing or injection molding) has been developed into an attractive manufacturing process for high aspect-ratio components with sub-micron feature definition. The technical and economic requirements for LIGA, and in particular, for an adequate synchrotron radiation source will be discussed. An optimized source, ANKA - Angstrom Source Karlsruhe - has been developed, which includes 3 beamlines for deep XRL terminating in a clean-room environment. Examples of current research projects will be presented and model cases will be discussed, which demonstrate the long and arduous road from the laboratory to commercial products.

Andrew Gilliland

Director of Stakeholder Relations, NINT (National Institute for Nanotechnology)
Second Vice President, APEGGA

Status and Planning for the National Institute for Nanotechnology

The status of the developing National Institute for Nanotechnology(NINT) located at UofA and a collaboration between NRC, UofA and Alberta will be addressed. The presentation will include comments on the vision and objectives of NINT, some thoughts on early research planning, and a very early strategy for the development of a cluster of organizations in Edmonton and Alberta which might use Nanotechnology for economic growth in the Province. The current state of development of NINT will be described, with a projection of planned developments in the future.

About the Speakers

Dr. David Klymyshyn

Dr. Klymyshyn is an Associate Professor of Electrical Engineering at the University of Saskatchewan and a Research Scientist at Telecommunications Research Laboratories (TRLabs) in Saskatoon. He teaches classes in Communications and Microwaves at both the undergraduate and graduate levels and was recently awarded the "Electrical Engineering Education Excellence Award" as chosen by the EE students.

From 1990-1994, Dr. Klymyshyn worked as an Electronic Design Engineer for SED Systems, Inc. in Saskatoon, Saskatchewan, Canada. His work involved RF and microwave design of satellite test and communication systems. During his employment he spent time in Montreal, Quebec, Canada, in Cornwall, UK, and in Singapore.

Dr. Klymyshyn is a member of the Communications Research Group. His research interests include microwave/wireless communication systems, microwave and RF circuit design, and digital modulation techniques. Much of his present research is in microwave/millimeter-wave multipoint communication systems (MCS) and is conducted at TRLabs which is equipped for testing up to 40 GHz. In addition, he is attempting to establish a research program in Micromachining and MEMs at the Canadian Light Source (CLS) Synchrotron. He has authored a number of papers and has received several patents in microwave transceiver circuits.

Professor Klymyshyn is a Member of the IEEE Communications Society and the IEEE Microwave Theory and Techniques Society. He is also a Registered Professional Engineer in Saskatchewan.

Dr. Volker Saile

Dr. Saile received his Diploma in Physics in 1973 from Hamburg University, Germany, and his Ph.D. in Physics in 1976 from Ludwig-Maximilians-Universität München, Germany, where he was an Assistant Professor until 1979.

From 1979 to 1989, Dr. Saile was a Staff Scientist at Deutsches Elektronen-Synchrotron DESY in Hamburg, Germany. During this time he was the Coordinator of VUV und XUV Experiments at HASYLAB from 1979 to 1985 and the Deputy Director of Synchrotron Radiation Laboratory HASYLAB at DESY, Hamburg from 1985 to 1989.

From 1989 to 1998, Dr. Saile was the Director of the J. Bennett Johnston, Sr., Center for Advanced Microstructures and Devices (CAMD), Louisiana State University, Baton Rouge, Louisiana, USA. He was also a Professor of Physics and a Professor of Electrical and Computer Engineering, Louisiana State University, during the same period. Since 1994, he has also been an Adjunct Professor of Chemistry, Northeast Louisiana University.

Since 1998, Dr. Saile has been the Managing Director of ANKA GmbH, Karlsruhe, Germany, as well as the Director of the Institute for Microstructure Technology at Forschungszentrum Karlsruhe, Germany. He is also a Professor of Microstructure Technology, Karlsruhe University, and an Adjunct Professor of Physics, Louisiana State University.

Andrew Gilliland

Andy Gilliland has a degree in Civil Engineering from Queen's University in Kingston and 20 years experience in the construction and concrete products industry across the Prairie provinces.

He joined NRC in 1984 as Regional Director of NRC's Industrial Research Assistance Program (IRAP) for Alberta/NT/NU. He served in that capacity until April 2002, at which time Mr. Gilliland joined the new NINT Institute in Edmonton, where he is Director of Stakeholder Relations.

Andy is a Board Member of InnoCentre Alberta, an organization which mentors and nurtures businesses for financial readiness. He has a good knowledge of the S&T and Innovation infrastructure in Alberta and other parts of Canada. He has served on a number of community organizations in the engineering and cultural fields. He is currently 2nd Vice President of APEGGA.



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